Now showing items 1-1 of 1

    • Influence of elastic strains on the mask ratio in glassy polymer nanoimprint 

      CROSS, GRAHAM; O'CONNELL, BARRY SEAMUS; PETHICA, JOHN BERNARD (American Institute of Physics, 2005)
      During glassy polymer nanoimprint, a supported film is extruded from protruding spunchd to recessed scavityd regions of a patterned stamp. The completeness of this extrusion determines the mask ratio for lithographic ...