Laser triggered Z-pinch broadband extreme ultraviolet source for metrology
Citation:
I. Tobin, L. Juschkin, Y. Sidelnikov, F. O Reilly, P. Sheridan, E. Sokell, and J. G. Lunney, Laser triggered Z-pinch broadband extreme ultraviolet source for metrology, Applied Physics Letters, 102, 20, 2013, 203504Download Item:
Abstract:
We compare the extreme ultraviolet emission characteristics of tin and galinstan (atomic %:
Ga: 78.35, In: 14.93, Sn: 6.72) between 10 nm and 18 nm in a laser-triggered discharge between
liquid metal-coated electrodes. Over this wavelength range, the energy conversion efficiency for
galinstan is approximately half that of tin, but the spectrum is less strongly peaked in the 13?15 nm
region. The extreme ultraviolet source dimensions were 110625 lm diameter and 5006125 lm
length. The flatter spectrum, and 19 C melting point, makes this galinstan discharge a relatively
simple high radiance extreme ultraviolet light source for metrology and scientific applications.
Sponsor
Grant Number
Enterprise Ireland
TD20090346
Enterprise Ireland
PC/07/069
Science Foundation Ireland (SFI)
07/IN.1/I1771
Author's Homepage:
http://people.tcd.ie/jlunneyDescription:
PUBLISHED
Author: LUNNEY, JAMES
Sponsor:
Enterprise IrelandEnterprise Ireland
Science Foundation Ireland (SFI)
Type of material:
Journal ArticleCollections
Series/Report no:
Applied Physics Letters102
20
Availability:
Full text availableKeywords:
ultravioletDOI:
http://dx.doi.org/10.1063/1.4807172Metadata
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