Transition metal dichalcogenide growth via close proximity precursor supply
File Type:
PDFItem Type:
Journal ArticleDate:
2015Author:
Access:
openAccessCitation:
O'Brien, M. McEvoy, N. Hallam, T. Kim, H.-Y. Berner, N.C. Hanlon, D. Lee, K. Coleman, J.N. Duesberg, G.S., Transition metal dichalcogenide growth via close proximity precursor supply, Scientific Reports, 4, 2015, 7374Download Item:
srep07374(1).pdf (PDF) 1.151Mb
Abstract:
Reliable chemical vapour deposition (CVD) of transition metal dichalcogenides (TMDs) is currently a
highly pressing research field, as numerous potential applications rely on the production of high quality
films on a macroscopic scale. Here, we show the use of liquid phase exfoliated nanosheets and patterned
sputter deposited layers as solid precursors for chemical vapour deposition. TMD monolayers were realized
using a close proximity precursor supply in a CVD microreactor setup. A model describing the growth
mechanism, which is capable of producing TMD monolayers on arbitrary substrates, is presented. Raman
spectroscopy, photoluminescence, X-ray photoelectron spectroscopy, atomic force microscopy,
transmission electron microscopy, scanning electron microscopy and electrical transport measurements
reveal the high quality of the TMD samples produced. Furthermore, through patterning of the precursor
supply, we achieve patterned growth of monolayer TMDs in defined locations, which could be adapted for
the facile production of electronic device components.
Sponsor
Grant Number
Science Foundation Ireland (SFI)
PI_10/IN.1/I3030
Science Foundation Ireland (SFI)
12/RC/2278
Science Foundation Ireland (SFI)
11/PI/1087.
Author's Homepage:
http://people.tcd.ie/colemajhttp://people.tcd.ie/leek1
http://people.tcd.ie/hallamt
http://people.tcd.ie/nberner
http://people.tcd.ie/duesberg
http://people.tcd.ie/mcevoyni
Description:
PUBLISHED
Author: COLEMAN, JONATHAN; DUESBERG, GEORG; HALLAM, TOBY; MCEVOY, NIALL; KIM, HYE; BERNER, NINA; LEE, KANGHO
Sponsor:
Science Foundation Ireland (SFI)Science Foundation Ireland (SFI)
Science Foundation Ireland (SFI)
Type of material:
Journal ArticleCollections:
Series/Report no:
Scientific Reports4
Availability:
Full text availableDOI:
http://dx.doi.org/10.1038/srep07374The following license files are associated with this item: