Browsing Electronic & Electrical Eng (Scholarly Publications) by Author "ADLEY, DAVID"
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Characterisation of thin film silicon films deposited by plasma enhanced chemical vapour deposition at 162MHz, using a large area, scalable, multi-tile-electrode plasma source
PEROVA, TANIA; ADLEY, DAVID (2011)Large area (600 ? 720 mm) depositions of hydrogenated microcrystalline silicon (?c-Si:H) have been achieved at high deposition rates using a scalable, multi-tile electrode topology. Depositions have shown local results of ...