Browsing Electronic & Electrical Eng (Scholarly Publications) by Subject "Germanium on Insulator"
Now showing items 1-1 of 1
-
Investigation of germanium implanted with hydrogen for layer transfer applications
(2011)The technology for thin Ge layer transfer by hydrogen ion-cut process is characterised in this work. Experiments were carried out to determine suitable hydrogen ion implantation doses in germanium for the low temperature ...