dc.contributor.author | PEROVA, TANIA | |
dc.contributor.author | MOORE, ALAN | |
dc.date.accessioned | 2010-02-01T12:49:46Z | |
dc.date.available | 2010-02-01T12:49:46Z | |
dc.date.created | 16-19 May | en |
dc.date.issued | 2004 | |
dc.date.submitted | 2004 | en |
dc.identifier.citation | S. Chakraborty, S.K. Samanta, S. Bhattacharya, J. McCarthy, B.M. Armstrong, H.S. Gamble, G.K. Dalapati, S. Das, T. Perova, R.A. Moore and C.K. Maiti `Electrical Properties of High-k Ta205 Gate Dielectrics on Strained Ge-rich Layers? in proceedings of the IEEE 24th International Conference on Microelectronics (MIEL-2004), NIS, Serbia and Montenegro, 16-19 May, 24, (2), 2004, pp 405 - 407 | en |
dc.identifier.other | Y | |
dc.description | PUBLISHED | en |
dc.description.abstract | The electrical properties of ultrathin high-k Zr02 gate
dielectric films dcposited on strained Gc-rich layers using
microwave plasma enhanced chemical vapor deposition (PECVD)
technique at a low temperature (150'C) have been studied. The
strained Ge-rich heterolaycrs have been analyzed by transmission
elcctron microscopy (TEM) and Raman spectra. X-ray
photoclectron spectroscopy (XPS) has been used for analysis of
chemical compositions of the deposited 2102 films. The fixed
oxide charge density (Qdq) and interface state density (D;,) are
found to be 4.8 x 10" cm~ 2an d 5 . 1 ~ 1 0 e' ~V -'mi2, respectively.
The capacitance-voltage (C-V) characteristics and current-voltage
(I-V) characteristics before and after constant current stressing
exhibit good electrical properties and thus indicate the suitability
of these films for future microelectronic applications. | en |
dc.format.extent | 405 - 407 | en |
dc.format.extent | 234504 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en | en |
dc.publisher | IEEE | en |
dc.relation.ispartofseries | 24 | en |
dc.relation.ispartofseries | 2 | en |
dc.rights | Y | en |
dc.subject | Mechanical and Manufacturing Engineering | |
dc.title | Electrical Properties of High-k Ta205 Gate Dielectrics on Strained Ge-rich Layers | en |
dc.type | Conference Paper | en |
dc.type.supercollection | scholarly_publications | en |
dc.type.supercollection | refereed_publications | en |
dc.identifier.peoplefinderurl | http://people.tcd.ie/rmoore | |
dc.identifier.peoplefinderurl | http://people.tcd.ie/perovat | |
dc.identifier.rssinternalid | 14143 | |
dc.identifier.rssuri | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1314652&isnumber=29143 | en |
dc.identifier.uri | http://hdl.handle.net/2262/36648 | |