| dc.contributor.author | BARIMAR, PRABHAVA SAI NARAYANA | en |
| dc.contributor.author | NAYDENOV, BORISLAV | en |
| dc.contributor.author | BOLAND, JOHN | en |
| dc.date.accessioned | 2016-11-10T11:35:26Z | |
| dc.date.available | 2016-11-10T11:35:26Z | |
| dc.date.issued | 2016 | en |
| dc.date.submitted | 2016 | en |
| dc.identifier.citation | Prabhava S. N. Barimar, Catherine M. Doyle, Borislav Naydenov, and John J. Boland, Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator, Journal of Vacuum Science & Technology B, 34, 2016, 041806- | en |
| dc.identifier.other | Y | en |
| dc.description | PUBLISHED | en |
| dc.format.extent | 041806 | en |
| dc.language.iso | en | en |
| dc.relation.ispartofseries | Journal of Vacuum Science & Technology B | en |
| dc.relation.ispartofseries | 34 | en |
| dc.rights | Y | en |
| dc.title | Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator | en |
| dc.type | Journal Article | en |
| dc.type.supercollection | scholarly_publications | en |
| dc.type.supercollection | refereed_publications | en |
| dc.identifier.peoplefinderurl | http://people.tcd.ie/barimarp | en |
| dc.identifier.peoplefinderurl | http://people.tcd.ie/jboland | en |
| dc.identifier.peoplefinderurl | http://people.tcd.ie/naydenob | en |
| dc.identifier.rssinternalid | 132517 | en |
| dc.identifier.doi | http://dx.doi.org/10.1116/1.4955067 | en |
| dc.rights.ecaccessrights | openAccess | |
| dc.subject.TCDTheme | Nanoscience & Materials | en |
| dc.subject.TCDTag | AFM phase analysis | en |
| dc.subject.TCDTag | Dewetting | en |
| dc.subject.TCDTag | Oxide desorption | en |
| dc.subject.TCDTag | SCANNING TUNNELLING MICROSCOPY (STM) | en |
| dc.subject.TCDTag | SILICON DIOXIDE FILMS | en |
| dc.subject.TCDTag | SILICON-ON-INSULATOR | en |
| dc.subject.TCDTag | STM | en |
| dc.subject.TCDTag | Scanning Tunneling Spectroscopy (STS) | en |
| dc.subject.TCDTag | Silicon carbide | en |
| dc.subject.TCDTag | Thermal treatment | en |
| dc.subject.TCDTag | Ultra high vacuum | en |
| dc.identifier.rssuri | http://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4955067 | en |
| dc.status.accessible | N | en |
| dc.contributor.sponsor | Science Foundation Ireland (SFI) | en |
| dc.contributor.sponsorGrantNumber | 12/IA/1482 | en |
| dc.identifier.uri | http://hdl.handle.net/2262/77690 | |
