Browsing Electronic & Electrical Eng by Subject "anisotropic silicon structure"
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Broad band infrared spectroscopy of grooved silicon
(SPIE, 2005)Grooved silicon (gr-Si) structures with a period of few micrometers, which were formed by anisotropic etching of (110) Si wafers, have been investigated by means of broad band infrared (IR) and submillimeter transmission ...