Browsing Electronic & Electrical Eng by Subject "silicon on insulator"
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Investigation of Precision Grinding Process for Production of Silicon Diaphragms
(Society of Photo-Optical Instrumentation Engineers, 2002)The application of precision grinding for the formation of a silicon diaphragm is investigated. The test structures involved 2?6 mm diam diaphragms with thicknesses in the range of 25?150 mm. When grinding is performed ...