Development and optimisation of optical interferometric techniques for surface metrology

Abstract

Optical surface metrology techniques offer many advantages over conventional methods. These include a greater sensitivity, improved lateral and vertical resolution, non-contact and full-field measurements and the fact that they are not subject to electromagnetic influence. However there has been reluctance in industry to adopt these techniques. Reasons include complicated operation and analysis procedures, the use of high-power and dangerous lasers, expensive systems and the requirement for a mechanically stable environment. The objective of the research described in this thesis was to utilise recent developments in relevant technologies (physics, computer technology, and data acquisition) to develop industrial prototype systems.