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    • Nanofabrication and electronic transport properties of silicon nanowires 

      VERMA, AKSHARA (Trinity College Dublin. School of Physics. Discipline of Physics, 2019)
      This project develops a robust and reliable process to pattern sub 20 nm features in negative tone Hydrogen Silsesquioxane (HSQ) resist using high-resolution Electron Beam Lithography (EBL) and a low damage reactive ion ...