Browsing School of Physics by Sponsor "IRCSET (OK)"
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Nanofabrication and electronic transport properties of silicon nanowires
(Trinity College Dublin. School of Physics. Discipline of Physics, 2019)This project develops a robust and reliable process to pattern sub 20 nm features in negative tone Hydrogen Silsesquioxane (HSQ) resist using high-resolution Electron Beam Lithography (EBL) and a low damage reactive ion ...